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Volumn 47, Issue 11, 1996, Pages 1361-1370

The helicoid multi-groove molecular and the turbomolecular vacuum pumps in molecular state under the scope of statistical behavior of molecules

Author keywords

[No Author keywords available]

Indexed keywords

GAS DYNAMICS; MOLECULAR DYNAMICS; STATISTICAL MECHANICS; VECTORS;

EID: 0030284318     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(96)00174-1     Document Type: Article
Times cited : (4)

References (12)
  • 1
    • 0009399699 scopus 로고
    • Die molekularloftpumpe
    • W Gaede, Die Molekularloftpumpe, Ann Physik, 41, 342 (1913).
    • (1913) Ann Physik , vol.41 , pp. 342
    • Gaede, W.1
  • 2
    • 84913070904 scopus 로고
    • Die turbomolekularpumpe
    • Jahrang 15
    • W Becker, Die Turbomolekularpumpe. Vakuum-Technik, Jahrang 15, 211 (1966); W Becker, The turbomolecular pump, its design, operation and theory, Vacuum, 16 (1966) 625.
    • (1966) Vakuum-Technik , vol.211
    • Becker, W.1
  • 3
    • 0000230838 scopus 로고
    • The turbomolecular pump, its design, operation and theory
    • W Becker, Die Turbomolekularpumpe. Vakuum-Technik, Jahrang 15, 211 (1966); W Becker, The turbomolecular pump, its design, operation and theory, Vacuum, 16 (1966) 625.
    • (1966) Vacuum , vol.16 , pp. 625
    • Becker, W.1
  • 4
    • 30244449762 scopus 로고
    • Rarefied gas dynamics
    • L Talbot (Ed.), Academic Press
    • G Kruger and A Shapiro, Rarefied gas dynamics, in Proc 2nd Int Symp Calif (1960), L Talbot (Ed.), Academic Press (1961) 117; G Kruger and A Shapiro, Vacuum pumping with a bladed axial-flow turbo-machine, 7th Nat Symp Vac Techn Transact, (1960) 6-12.
    • (1960) Proc 2nd Int Symp Calif , pp. 117
    • Kruger, G.1    Shapiro, A.2
  • 5
    • 0343084928 scopus 로고
    • Vacuum pumping with a bladed axial-flow turbo-machine
    • G Kruger and A Shapiro, Rarefied gas dynamics, in Proc 2nd Int Symp Calif (1960), L Talbot (Ed.), Academic Press (1961) 117; G Kruger and A Shapiro, Vacuum pumping with a bladed axial-flow turbo-machine, 7th Nat Symp Vac Techn Transact, (1960) 6-12.
    • (1960) 7th Nat Symp Vac Techn Transact , pp. 6-12
    • Kruger, G.1    Shapiro, A.2
  • 7
    • 0028485829 scopus 로고
    • The helicoid multi-groove vacuum pump in both viscous and molecular states
    • C N Panos, A G Antoniou and S E Valamontes, The helicoid multi-groove vacuum pump in both viscous and molecular states, Vacuum, 45, 841 (1994).
    • (1994) Vacuum , vol.45 , pp. 841
    • Panos, C.N.1    Antoniou, A.G.2    Valamontes, S.E.3
  • 8
    • 0007116920 scopus 로고
    • Thirty years of turbomolecular pumps: A review and recent developments
    • J Henning, Thirty years of turbomolecular pumps: A review and recent developments, J Vac Sci Technol, A6(3), 1196 (1988).
    • (1988) J Vac Sci Technol , vol.A6 , Issue.3 , pp. 1196
    • Henning, J.1
  • 9
    • 0029342724 scopus 로고
    • The turbomolecular pump in molecular state
    • A G Antoniou, S E Valamontes and C N Panos, The turbomolecular pump in molecular state, Vacuum, 46, 709 (1995).
    • (1995) Vacuum , vol.46 , pp. 709
    • Antoniou, A.G.1    Valamontes, S.E.2    Panos, C.N.3
  • 11
    • 0342650746 scopus 로고
    • Pompe moleculaire helicoidale
    • M Holweck, Pompe moleculaire helicoidale, CR Acad Sci Paris, 177, 43 (1923).
    • (1923) CR Acad Sci Paris , vol.177 , pp. 43
    • Holweck, M.1
  • 12
    • 0016334090 scopus 로고
    • On performance improvement of axial-flow molecular pump
    • S Iida and O Kimura, On performance improvement of axial-flow molecular pump, in Proc 6th Inter Vacuum Congress, 8 (1974).
    • (1974) Proc 6th Inter Vacuum Congress , pp. 8
    • Iida, S.1    Kimura, O.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.