Phase formation between codeposited Co-Ta thin film and single-crystal silicon substrates

Thin Solid Films

Volumn 288, Issue 1-2, 1996, Pages 132-138

  Briskin, G ^a   Pelleg, J ^a   Talianker, M ^a  

^a BEN GURION UNIVERSITY OF THE NEGEV   (Israel)

Author keywords

Co Ta; Phase formation; Si

Indexed keywords

COBALT; CRYSTALLIZATION; DEPOSITION; ELECTRON GUNS; REACTION KINETICS; SILICON; SINGLE CRYSTALS; SUBSTRATES; TANTALUM; THERMAL EFFECTS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

PHASE FORMATION;

SEMICONDUCTING FILMS;

EID: 0030283814     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)08819-0     Document Type: Article

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