Metastable oxygen-silicon interstitial complex in crystalline silicon

Semiconductor Science and Technology

Volumn 11, Issue 11, 1996, Pages 1696-1703

  Abdullin, Kh A ^a   Mukashev, B N ^a   Gorelkinskii, Yu V ^a  

^a INSTITUTE OF IONOSPHERE   (Kazakhstan)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; EXPERIMENTS; IRRADIATION; OXYGEN; PROTONS; SILICON;

CRYSTALLINE SILICON; METASTABLE OXYGEN-SILICON COMPLEX;

CRYSTALLINE MATERIALS;

EID: 0030283499     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/11/11/010     Document Type: Article

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