메뉴 건너뛰기




Volumn 79, Issue 11, 1996, Pages 2809-2814

Kinetics of thermal oxidation of silicon nitride powders

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; PARTICLES (PARTICULATE MATTER); POWDERS; REACTION KINETICS; THERMAL EFFECTS; THERMOGRAVIMETRIC ANALYSIS; THERMOOXIDATION; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0030283433     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1151-2916.1996.tb08712.x     Document Type: Article
Times cited : (28)

References (29)
  • 2
    • 0024664405 scopus 로고
    • Oxidation Studies of Crystalline CVD Silicon Nitride
    • H. Du, R. E. Tressler, K. E. Spear, and C. G. Pantano, "Oxidation Studies of Crystalline CVD Silicon Nitride," J. Electrochem. Soc., 136 [5] 1527-36 (1989).
    • (1989) J. Electrochem. Soc. , vol.136 , Issue.5 , pp. 1527-1536
    • Du, H.1    Tressler, R.E.2    Spear, K.E.3    Pantano, C.G.4
  • 4
    • 4344659236 scopus 로고
    • Oxidation of Chemically-Vapor-Deposited Silicon Nitride and Single-Crystal Silicon
    • D. J. Choi, D. B. Fischbach, and W. D. Scott, "Oxidation of Chemically-Vapor-Deposited Silicon Nitride and Single-Crystal Silicon," J. Am. Ceram. Soc., 72 [7] 1118-23 (1989).
    • (1989) J. Am. Ceram. Soc. , vol.72 , Issue.7 , pp. 1118-1123
    • Choi, D.J.1    Fischbach, D.B.2    Scott, W.D.3
  • 5
    • 0015077820 scopus 로고
    • Conversion of Silicon Nitride into Silicon Dioxide through the Influence of Oxygen
    • I. Fränz and W. Langheinrich, "Conversion of Silicon Nitride into Silicon Dioxide through the Influence of Oxygen," Solid-State Electron., 14, 499-505 (1971).
    • (1971) Solid-State Electron. , vol.14 , pp. 499-505
    • Fränz, I.1    Langheinrich, W.2
  • 7
    • 84977250329 scopus 로고
    • Oxidation Kinetics of Powdered Silicon Nitride
    • R. M. Horton, "Oxidation Kinetics of Powdered Silicon Nitride," J. Am. Ceram. Soc., 52 [3] 121-23 (1969).
    • (1969) J. Am. Ceram. Soc. , vol.52 , Issue.3 , pp. 121-123
    • Horton, R.M.1
  • 8
    • 0018029955 scopus 로고
    • Oxidation of Silicon Nitride in the Temperature Range 1150°-1450°C
    • J. Mukerji and A. K. Nandi, "Oxidation of Silicon Nitride in the Temperature Range 1150°-1450°C," Indian J. Technol., 16, 419-21 (1978).
    • (1978) Indian J. Technol. , vol.16 , pp. 419-421
    • Mukerji, J.1    Nandi, A.K.2
  • 10
    • 0026238218 scopus 로고
    • 4 Following Thermal Excursions
    • 4 Following Thermal Excursions," J. Electrochem. Soc., 138 [10] L53-L55 (1991).
    • (1991) J. Electrochem. Soc. , vol.138 , Issue.10
    • Ogbuji, L.U.J.T.1
  • 11
    • 0004071517 scopus 로고
    • The Oxidation Process in Silicon Nitride
    • Edited by K. G. Nickel. Kluwer, Dordrecht, The Netherlands
    • L. U. J. T. Ogbuji, "The Oxidation Process in Silicon Nitride"; pp. 117-29 in Corrosion of Advanced Ceramics. Edited by K. G. Nickel. Kluwer, Dordrecht, The Netherlands, 1994.
    • (1994) Corrosion of Advanced Ceramics , pp. 117-129
    • Ogbuji, L.U.J.T.1
  • 14
    • 84967373859 scopus 로고
    • 4 Interface, Part I: Nature of the Interphase
    • 4 Interface, Part I: Nature of the Interphase," J. Am. Ceram. Soc., 78 [5] 1272-78 (1995).
    • (1995) J. Am. Ceram. Soc. , vol.78 , Issue.5 , pp. 1272-1278
    • Ogbuji, L.U.J.T.1    Bryan, S.R.2
  • 15
    • 84986409857 scopus 로고
    • 2 Permeation and Oxidation Reaction
    • 2 Permeation and Oxidation Reaction," J. Am. Ceram. Soc., 78 [5] 1279-84 (1995).
    • (1995) J. Am. Ceram. Soc. , vol.78 , Issue.5 , pp. 1279-1284
    • Ogbuji, L.U.J.T.1
  • 17
    • 0026097278 scopus 로고
    • Some New Perspectives on Oxidation of Silicon Carbide and Silicon Nitride
    • K. L. Luthra, "Some New Perspectives on Oxidation of Silicon Carbide and Silicon Nitride," J. Am. Ceram. Soc., 74 [5] 1095-103 (1991).
    • (1991) J. Am. Ceram. Soc. , vol.74 , Issue.5 , pp. 1095-1103
    • Luthra, K.L.1
  • 18
    • 0027870045 scopus 로고
    • Effects of α-Silicon Nitride Powder Processing on Surface Oxidation Kinetics
    • P. S. Wang, S. G. Malghan, S. M. Hsu, and T. N. Wittberg, "Effects of α-Silicon Nitride Powder Processing on Surface Oxidation Kinetics," J. Mater. Res., 8 [12] 3168-75 (1993).
    • (1993) J. Mater. Res. , vol.8 , Issue.12 , pp. 3168-3175
    • Wang, P.S.1    Malghan, S.G.2    Hsu, S.M.3    Wittberg, T.N.4
  • 19
    • 0008695730 scopus 로고
    • Methotik der Messung von Diffusionsgeschwindigkeiten bei Lösungsvorgängen von Gasen in Festen Phasen
    • H. Dunwald and C. Wagner, "Methotik der Messung von Diffusionsgeschwindigkeiten bei Lösungsvorgängen von Gasen in Festen Phasen," Z. Phys. Chem., Abt. B, 24 [1] 53-58 (1934).
    • (1934) Z. Phys. Chem., Abt. B , vol.24 , Issue.1 , pp. 53-58
    • Dunwald, H.1    Wagner, C.2
  • 20
    • 0001248145 scopus 로고
    • Cinètique de L'Oxydation de Sphèrules et de Poudres Mètalliques
    • G. Valensi, "Cinètique de L'Oxydation de Sphèrules et de Poudres Mètalliques," Campt. Rend., 202 [4] 309-12 (1936).
    • (1936) Campt. Rend. , vol.202 , Issue.4 , pp. 309-312
    • Valensi, G.1
  • 21
    • 0000617806 scopus 로고
    • Concerning the Diffusion Kinetics of Reactions in Spherical Particles
    • A. M. Ginstling and B. I. Brounshtein, "Concerning the Diffusion Kinetics of Reactions in Spherical Particles," Zh. Prikl. Khim. (Leningrad), 23, 1327-38 (1950).
    • (1950) Zh. Prikl. Khim. (Leningrad) , vol.23 , pp. 1327-1338
    • Ginstling, A.M.1    Brounshtein, B.I.2
  • 22
    • 0000206274 scopus 로고
    • The Kinetics of Reactions of Aluminates and the Role of Mineralizing Agents in this Process
    • V. F. Zhuravlev, I. G. Lesokhin, and R. G. Tempelman, "The Kinetics of Reactions of Aluminates and the Role of Mineralizing Agents in this Process," J. Appl. Chem. USSR (Engl. Transl.), 21 [9] 887-902 (1948).
    • (1948) J. Appl. Chem. USSR (Engl. Transl.) , vol.21 , Issue.9 , pp. 887-902
    • Zhuravlev, V.F.1    Lesokhin, I.G.2    Tempelman, R.G.3
  • 23
    • 5544224278 scopus 로고
    • Über die Geschwindigkeiten der zur Glasschmelze führenden Reaktionen. II. Die Umsetzung von Natriumdisilikat mit Soda und von Quarz mit Kalkstein
    • C. Kroger and G. Ziegler, "Über die Geschwindigkeiten der zur Glasschmelze führenden Reaktionen. II. Die Umsetzung von Natriumdisilikat mit Soda und von Quarz mit Kalkstein," Glastech. Ber., 26 [11] 346-53 (1953).
    • (1953) Glastech. Ber. , vol.26 , Issue.11 , pp. 346-353
    • Kroger, C.1    Ziegler, G.2
  • 25
    • 36849141847 scopus 로고
    • Kinetic Model for Solid-State Reactions
    • R. E. Carter, "Kinetic Model for Solid-State Reactions," J. Chem. Phys., 34 [6] 2010-15 (1961).
    • (1961) J. Chem. Phys. , vol.34 , Issue.6 , pp. 2010-2015
    • Carter, R.E.1
  • 26
    • 0002743057 scopus 로고
    • Models for Solid-State Reactions in Powdered Compacts: A Review
    • S. F. Hulbert, "Models for Solid-State Reactions in Powdered Compacts: A Review," J. Br. Ceram. Soc., 6, 11-12 (1969).
    • (1969) J. Br. Ceram. Soc. , vol.6 , pp. 11-12
    • Hulbert, S.F.1
  • 27
    • 0002779054 scopus 로고
    • Reactions in the Solid State
    • Edited by C. H. Bamford and C. F. H. Tipper. Elsevier, New York
    • M. E. Brown, D. Dollimore, and A. K. Galwey, "Reactions in the Solid State"; pp. 41-113 in Comprehensive Chemical Kinetics, Vol. 22. Edited by C. H. Bamford and C. F. H. Tipper. Elsevier, New York, 1980.
    • (1980) Comprehensive Chemical Kinetics , vol.22 , pp. 41-113
    • Brown, M.E.1    Dollimore, D.2    Galwey, A.K.3
  • 29
    • 0023439479 scopus 로고
    • Oxygen Distribution in Silicon Nitride Powders
    • M. Peuckert and P. Greil, "Oxygen Distribution in Silicon Nitride Powders," J. Mater. Sci., 22, 3717-20 (1987).
    • (1987) J. Mater. Sci. , vol.22 , pp. 3717-3720
    • Peuckert, M.1    Greil, P.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.