Neutral and charged particle simulation of a RF argon plasma

Plasma Sources Science and Technology

Volumn 5, Issue 4, 1996, Pages 685-695

  Nagayama, K ^a   Farouk, B ^a   Lee, Y H ^a  

^a Drexel University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ELECTRIC DISCHARGES; MICROWAVES; MONTE CARLO METHODS;

NEUTRAL AND CHARGED PARTICLE SIMULATION;

PLASMAS;

EID: 0030282986     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/5/4/010     Document Type: Article

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