The power balance of a magnetically confined surface-wave plasma column

Plasma Sources Science and Technology

Volumn 5, Issue 4, 1996, Pages 653-661

  Peres I ^a   Margot, J ^a  

^a UNIVERSITÉ DE MONTRÉAL   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ELECTRIC DISCHARGES; HYDRODYNAMICS; MAGNETIC FIELDS; MAGNETIZATION; MATHEMATICAL MODELS; PLASMAS;

POWER BALANCE;

PLASMA SOURCES;

EID: 0030282885     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/5/4/007     Document Type: Article

References (15)

1. Ferreira C M and Moisan M 1988 Phys. Scr. 38 382
2. Glaude V M M, Moisan M, Pantel R, Leprince P and Marec J 1980 J. Appl. Phys. 51 5683
3. Zakrzewski Z 1983 J. Phys. D: Appl. Phys. 16 171
4. Ferreira C M 1983 J. Phys. D: Appl. Phys. 16 1673
5. See for example Chaker M and Moisan M 1985 J. Appl. Phys. 57 91
6. Chaker M, Nghiem P, Bloyet E, Leprince P and Marec J 1982 J. Physique. Lett. 43 L71
7. Moisan M, Barbeau C, Claude R, Ferreira C M, Margot J, Paraszczak J, Sá A B, Sauvé G and Wertheimer M R 1991 J. Vac. Sci. Technol. B 9 8
8. Ferreira C M and Loureiro J 1984 J. Phys. D: Appl. Phys. 17 1175
9. Ferreira C M 1993 Kinetic modelling of microwave discharges Microwave Discharges: Fundamentals and Applications (NATO ASI Series) vol 302, ed C M Ferreira and M Moisan (New York: Plenum)
10. Bounasri F, Gat E, Chaker M, Moisan M, Margot J and Ravet M F 1995 J. Appl. Phys. 78 6780
11. Gat E, Bounasri F, Chaker M, Ravet M F, Moisan M and Margot J 1996 Microelectron. Eng. 30 337
12. Margot J, Moisan M and Fortin M 1995 J. Vac. Sci. Technol. A 13 2890
13. Loureiro J 1995 J. Appl. Phys. 78 4850
14. Pérès I, Fortin M and Margot J 1996 Phys. Plasmas 3 1754
15. Margot J and Moisan M 1991 J. Phys. D: Appl. Phys. 24 1765