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Volumn 84, Issue 1-3, 1996, Pages 388-391
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Formation of β-C3N4 grains by nitrogen-ion-beam-assisted deposition
a
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Author keywords
Carbon nitride; Ion beam assisted deposition
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Indexed keywords
AUGER ELECTRON SPECTROSCOPY;
CARBON;
CRYSTALLINE MATERIALS;
CURRENT DENSITY;
DEPOSITION;
ELECTRIC CONDUCTIVITY;
HARDNESS;
ION BEAMS;
ION BOMBARDMENT;
NITROGEN;
THIN FILMS;
TRANSMISSION ELECTRON MICROSCOPY;
CARBON NITRIDE;
ION BEAM ASSISTED DEPOSITION;
KNOOP HARDNESS;
NITRIDES;
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EID: 0030270115
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(95)02809-9 Document Type: Article |
Times cited : (31)
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References (15)
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