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Surface and Coatings Technology

Volumn 84, Issue 1-3, 1996, Pages 448-452

Room temperature deposition of titanium carbide by ion-beam-enhanced reaction of titanium films with hydrocarbons

(2) Schroer A a Ensinger, W b

a MATGmbH Dresden (Germany)

b UNIVERSITY OF AUGSBURG (Germany)

Author keywords

Ion beam assisted deposition; Ion induced reaction; Titanium carbide

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CHEMICAL REACTIONS; COMPOSITION; CRYSTAL ORIENTATION; CURRENT DENSITY; DEPOSITION; EVAPORATION; HYDROCARBONS; ION BEAMS; PHASE COMPOSITION; TITANIUM CARBIDE; X RAY DIFFRACTION;

ELECTRON BEAM EVAPORATION; ETHENE; ION BEAM ASSISTED DEPOSITION; ION BEAM ENHANCED REACTION; TITANIUM FILMS;

METALLIC FILMS;

EID: 0030269545 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(95)02811-0 Document Type: Article

Times cited : (6)

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