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Microelectronics Reliability

Volumn 36, Issue 10, 1996, Pages 1369-1374

Reliability and yield in fabrication of microcantilever structures using bulk silicon micromachining

(3) Rawicz, A a Parameswaran, M a Chen, J M a

a SIMON FRASER UNIVERSITY (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTROCHEMISTRY; ETCHING; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROMACHINING; RELIABILITY; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; STATIC ELECTRICITY;

LOCALIZED STATIC CHARGES; MICROCANTILEVER STRUCTURES; SPECTRUM OF FUNCTION;

MICROELECTRONIC PROCESSING;

EID: 0030269316 PISSN: 00262714 EISSN: None Source Type: Journal
DOI: 10.1016/0026-2714(96)00036-4 Document Type: Article

Times cited : (2)

References (8)

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