On chemomechanical polishing of Si3N4 with Cr2O3

Philosophical Magazine A: Physics of Condensed Matter, Structure, Defects and Mechanical Properties

Volumn 74, Issue 4, 1996, Pages 1003-1017

  Bhagavatula, S R ^a   Komanduri, R ^a  

^a Oklahoma State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030266313     PISSN: 01418610     EISSN: None     Source Type: Journal    
DOI: 10.1080/01418619608242173     Document Type: Article

References (34)

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