An application of polyphenylsilsesquioxane (PPSQ) to organic anti reflective coating (ARC)

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 35, Issue 10 PART A, 1996, Pages

  Minami, Shintaro ^a   Adachi, Etsushi ^a   Adachi, Hiroshi ^a  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

Author keywords

Anti reflective coating; Dye; Inorganic polymer; Ladder polymer; Polyphenylsilsesquioxane

Indexed keywords

ANTIREFLECTION COATINGS; COATING TECHNIQUES; DYES; INORGANIC POLYMERS; LIGHT ABSORPTION; REFLECTOMETERS;

ANTIREFLECTIVE COATING (ARC); POLYPHENYLSILSESQUIOXANE (PPSQ); SPIN COATING;

ORGANIC COATINGS;

EID: 0030264521     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.l1257     Document Type: Article

References (4)

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4. R. M. A. Azam and N. M. Bashara: Ellipsometry and Polaried Light (North-Holland, Amsterdam, 1977) p. 283.