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Japanese Journal of Applied Physics, Part 2: Letters

Volumn 35, Issue 10 SUPPL. B, 1996, Pages

Highly oriented crystalline carbon thin films obtained by DC magnetron sputtering with a hot filament

(4) Onuma, Yoshiharu a Kawai, Yoshifumi a Nakao, Masato a Kamimura, Kiichi a

a SHINSHU UNIVERSITY (Japan)

Author keywords

Carbon; Chaoite; Polycrystalline film; Preferred orientation; Sputtering; Thin film

Indexed keywords

CARBON; CHARACTERIZATION; CRYSTAL ORIENTATION; CRYSTAL STRUCTURE; FILM PREPARATION; MAGNETRON SPUTTERING; POLYCRYSTALLINE MATERIALS; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SCANNING ELECTRON MICROSCOPY; X RAY CRYSTALLOGRAPHY; X RAY DIFFRACTION ANALYSIS;

CARBYNE; CHAOITE; CRYSTALLINE CARBON; DC MAGNETRON SPUTTERING; FINITE ELEMENT SCANNING ELECTRON MICROSCOPY; HOT FILAMENT;

THIN FILMS;

EID: 0030264211 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.35.l1354 Document Type: Article

Times cited : (4)

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