Fabrication of a fiber probe with a nanometric protrusion for near-field optical microscopy by a novel technique of three-dimensional nanophotolithography

Journal of Lightwave Technology

Volumn 14, Issue 10, 1996, Pages 2224-2230

  Matsumoto, Takuya ^a   Ohtsu, Motoichi ^b  

^a Tokyo Inst of Technol ^*  (Japan)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC WAVE DIFFRACTION; ETCHING; LIGHT SCATTERING; METALLIC FILMS; NANOTECHNOLOGY; OPTICAL FIBERS; OPTICAL MICROSCOPY; PHOTOLITHOGRAPHY; SEMICONDUCTOR DEVICES;

FIBER PROBE; NANOMETRIC PROTRUSION; NEAR FIELD OPTICAL MICROSCOPY; THREE DIMENSIONAL NANO PHOTOLITHOGRAPHY;

MICROSCOPES;

EID: 0030263877     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/50.541211     Document Type: Article

References (14)

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