Fabrication of a fiber probe with a nanometric protrusion for near-field optical microscopy by a novel technique of three-dimensional nanophotolithography

Journal of Lightwave Technology

Volumn 14, Issue 10, 1996, Pages 2224-2230

  Matsumoto, Takuya ^a   Ohtsu, Motoichi ^b  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC WAVE DIFFRACTION; ETCHING; LIGHT SCATTERING; METALLIC FILMS; NANOTECHNOLOGY; OPTICAL FIBERS; OPTICAL MICROSCOPY; PHOTOLITHOGRAPHY; SEMICONDUCTOR DEVICES;

FIBER PROBE; NANOMETRIC PROTRUSION; NEAR FIELD OPTICAL MICROSCOPY; THREE DIMENSIONAL NANO PHOTOLITHOGRAPHY;

MICROSCOPES;

EID: 0030263877     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/50.541211     Document Type: Article

References (14)

1. W. Pohl and D. Courjon, Eds., Near-Field Optics. Dordrecht, The Netherlands: Kluwer Academic, 1993.
2. M. Ohtsu, "Progress of high resolution photon scanning tunneling microscopy due to a nanometric fiber probes," IEEE J. Lightwave Technol., vol. 13, pp. 1200-1221, 1995.
3. D. Courjon, J. Vigoureux, M. Spajer, K. Sarayeddine, and S. Leblanc, "External and internal reflection near field microscopy: Experiments and result," Appl. Opt., vol. 29, pp. 3734-3740, 1990.
4. S. Jiang, H. Ohasawa, K. Yamada, T. Panagaribuan, M. Ohtsu, K. Imai, and A. Ikai, "Nanometric scale biosample observation using a photon scanning tunneling microscope," Japan J. Appl. Phys., vol. 31, pp. 2282-2287, 1992.
5. M. Naya, S. Mononobe, R. Uma Maheswari, T. Saiki, and M. Ohtsu, "Imaging of biological samples by a collection-mode photon scanning tunneling microscope with an apertured probe," Opt. Commun., vol. 124, pp. 9-15, 1996.
6. E. Betzig and J. K. Trautman, "Near-field optics: Microscopy, spectroscopy, and surface modification beyond the diffraction limit," Science, vol. 257, pp. 189-195, 1992.
7. R. U. Maheswari, H. Tatsumi, Y. Katayama, and M. Ohtsu, "Observation of subcellular nanostructure of single neurons with an illumination mode photon scanning tunneling microscope," Opt. Commun., vol. 120, pp. 325-334, 1995.
8. K. Jang and W. Jhe, "Nonglobal model for a near-field scanning optical microscope using diffraction of the optical near field," Opt. Lett., vol. 21, pp. 236-238, 1996.
9. B. Labani, C. Girard, D. Courjon, and D, Van Labeke, "Optical interaction between a dielectric tip and nanometric lattice: Implications for near-field microscopy," J. Optic. Soc. Am. B., vol. 7, pp. 939-943, 1990.
10. T. Pangaribuan, S. Jiang, and M. Ohtsu, "Two-step etching method for fabrication of fiber probe for photon scanning tunneling microscope," Electron. Lett., vol. 29, pp. 1978-1979, 1993.
11. _, "Highly controllable fabrication of fiber probe for photon scanning tunneling microscope," Scanning, vol. 16, pp. 362-367, 1994.
12. R. Toledo-Crow, P. C. Yang, Y. Chen, and M. Vaez-Iravani, "Near-field differential scanning optical microscope with atomic force regulation," Appl. Phys. Lett., vol. 60, pp. 2957-2959, 1992.
13. E. Betzig, P. L. Finn, and J. S. Weiner, "Combined shear force and near-field scanning optical microscopy," Appl. Phys. Lett., vol. 60, pp. 2484-2486, 1992.
14. G. A. Valaskovic, M. Holton, and G. H. Morrison, "Image contrast of dielectric specimens in transmission mode near-field scanning optical microscopy: Imaging properties and tip artifacts," J. Microscopy, vol. 179, pp. 29-54, 1995.