A controlled-force stylus displacement probe

Precision Engineering

Volumn 19, Issue 2-3, 1996, Pages 105-111

  Chetwynd, D G ^a   Liu, X ^a   Smith, S T ^b  

^a UNIVERSITY OF WARWICK   (United Kingdom)

^b UNIVERSITY OF NORTH CAROLINA AT CHARLOTTE   (United States)

Author keywords

Capacitive sensing; Force control; Stylus instruments; Surface profiling

Indexed keywords

ATOMIC FORCE MICROSCOPY; FORCE CONTROL; NANOTECHNOLOGY; PRECISION ENGINEERING; SURFACE MEASUREMENT;

STYLUS INSTRUMENTS; SURFACE PROFILING;

SURFACE PROPERTIES;

EID: 0030263648     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0141-6359(96)00008-6     Document Type: Article

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