Applications of gas cluster ion beams for materials processing

Materials Science and Engineering: A

Volumn 217-218, Issue , 1996, Pages 82-88

  Yamada, Isao ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

Applications; Gas cluster ion beams; Materials processing

Indexed keywords

COMPUTER SIMULATION; ION IMPLANTATION; IRRADIATION; MATERIALS SCIENCE; SPUTTERING; SURFACE ROUGHNESS; SURFACE STRUCTURE; SURFACE TREATMENT;

CLUSTER ION SURFACE INTERACTIONS; GAS CLUSTER ION BEAMS; MATERIALS PROCESSING;

ION BEAMS;

EID: 0030263148     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5093(96)10358-0     Document Type: Article

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