Processing and ultraviolet patterning of LiNbO3 epitaxial films from metallorganic precursors

Materials Science and Engineering B

Volumn 41, Issue 1, 1996, Pages 117-122

  Hirano, Shin Ichi ^a   Yogo, Toshinobu ^a   Kikuta, Ko Ichi ^a   Sakamoto, Wataru ^a   Takeichi, Yoshikuni ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

Epitaxial films; Ferroelectric thin films; Metallorganic precursors

Indexed keywords

EPITAXIAL GROWTH; FABRICATION; FERROELECTRIC MATERIALS; SOL-GELS; ULTRAVIOLET RADIATION;

EPITAXIAL FILM; FERROELECTRIC THIN FILM; METALLORGANIC PRECURSORS;

THIN FILMS;

EID: 0030262139     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(96)01636-4     Document Type: Article

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