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Thin Solid Films

Volumn 287, Issue 1-2, 1996, Pages 51-56

Epitaxial growth of InSb films by r.f. magnetron sputtering

(4) Miyazaki, Takayuki a Kunugi, Mistuo a Kitamura, Youichi a Adachi, Sadao a

a GUNMA UNIVERSITY (Japan)

Author keywords

Ellipsometry; Epitaxy; Indium antimonide; Sputtering

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELLIPSOMETRY; EPITAXIAL GROWTH; HALL EFFECT; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; SEMICONDUCTING INDIUM COMPOUNDS; SPUTTER DEPOSITION;

CONVENTIONAL DIODE (CD) SPUTTERING; INDIUM ANTIMONIDE; PLANAR MAGNETRON (PM) SPUTTERING; SAPPHIRE SUBSTRATES;

SEMICONDUCTING FILMS;

EID: 0030261457 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(96)08738-X Document Type: Article

Times cited : (22)

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