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Volumn 28, Issue 10, 1996, Pages 1327-1334
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High-speed InGaAs metal-semiconductor-metal photodetectors with improved responsivity and process yield
a a b b |
Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRODES;
FABRICATION;
FIELD EFFECT TRANSISTORS;
GOLD;
INTEGRATED OPTOELECTRONICS;
LIGHTING;
OPTICAL COMMUNICATION;
OXIDES;
SEMICONDUCTING GALLIUM ARSENIDE;
SEMICONDUCTING INDIUM COMPOUNDS;
CADMIUM TIN OXIDE;
INDIUM TIN OXIDE;
LIGHTWAVE COMMUNICATION SYSTEM;
LINEAR PHOTORESPONSE;
METAL SEMICONDUCTOR METAL PHOTODETECTOR;
SCHOTTKY CONTACTS;
PHOTODETECTORS;
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EID: 0030261291
PISSN: 03068919
EISSN: None
Source Type: Journal
DOI: 10.1007/BF00326205 Document Type: Article |
Times cited : (12)
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References (13)
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