Interdiffusion in compositionally modulated amorphous Nb/Si multilayers

Thin Solid Films

Volumn 287, Issue 1-2, 1996, Pages 293-296

  Zhang, Ming ^a   Yu, Wen ^a   Wang, W H ^a   Wang, W K ^a  

^a INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; ANNEALING; FILM PREPARATION; INTERDIFFUSION (SOLIDS); ION BEAMS; NIOBIUM; SILICON; SPUTTERING; THERMAL EFFECTS; X RAY DIFFRACTION ANALYSIS;

AMORPHOUS NIOBIUM SILICON MULTILAYERS; DEFECT TRAP RETARDED DIFFUSION; INTENSITY DECAY; ION BEAM SPUTTERING;

METALLIC SUPERLATTICES;

EID: 0030261124     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)08765-2     Document Type: Article

References (24)

1. S.M. Prokes F. Spaepen Appl. Phys. Lett. 47 1985 234 236
2. E. Nygren B. Park L.M. Goldman F. Spaepen Appl. Phys. Lett. 56 1990 2094
3. J.O. Olowafe C.J. Mogaab J. Appl. Phys. 72 1992 4099
4. C.A. Ross D.T. Wu L.M. Goldman F. Spaepen J. Appl. Phys. 72 1992 2773
5. T. Novet J.M. McConnell D.C. Johnson Chem. Mater. 4 1992 473
6. W.K. Wang W.H. Wang H.Y. Bai Mater. Sci. Eng. A179/A180 1994 234 237
7. A.L. Greer F. Spaepen L.L. Chang B.C. Giessen Synthetic Modulated Structure 1985 Academic Press New York
8. H.E. Cook J.E. Hilliard J. Appl. Phys. 40 1969 2191
9. M.P. Rosenblum D. Turnbull Appl. Phys. Lett. 37 1980 184
10. W.H. Wang H.Y. Bai W.K. Wang J. Appl. Phys. 74 1993 2471
11. H.Y. Bai W.H. Wang W.K. Wang J. Mater. Res. 7 1992 1423
12. W.H. Wang H.Y. Bai W.K. Wang Mater. Sci. Eng. B22 1994 211 216
13. S. Coffa J.M. Poate D.C. Jacobson W. Frank W. Gustin Phys. Rev. B45 1992 8355
14. P. Dhez C. Weisbuch Physics, Fabrcation and Applications of Multilayered structures 1988 Plenum New York
15. S.P. Murarka Silicides for VISI Application 1983 Academic Press Orlando, FL
16. H.Y. Bai W.H. Wang Y. Zhang H. Chen W.K. Wang J. Mater. Res. 7 6 1992 1423
17. Eric E. Fullerton J. Pearson C.H. Sowers S.D. Bader Phys. Rev. B48 1993 17432
18. T.S. Lundy F.E. Winslow R.E. Powel C.J. McHargue Trans. Met. Soc. AIME 223 1969 1533
19. A. Seeger K.P. Chik Phys. Status Solidi 29 1968 445
20. Eicke R. Weber Appl. Phys. A 30 1983 1
21. D. Shaw Atomic Diffusion in Semiconductors 1973 Plenum Press London
22. D.E. Polk D.S. Boundreaux Phys. Rev. Lett. 31 1973 92
23. H. Nakajima H. Fujimori Sci. Rep. Res. Inst. Tohoku Uni. 35 1 1990 1 18
24. Charles Kittel Introduction to Solid State Physics 1986 Wiley New York