Precision table control system by friction drive for optical disk mastering machine

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

Volumn 62, Issue 10, 1996, Pages 1444-1448

  Sakuta, Shigeru ^a   Adachi, Mikio ^a   Ogawa, Kiyoshi ^a   Takasu, Noboru ^a   Ueda, Katsunobu ^a   Taira, Kozo ^a   Nakano, Toshiyuki ^a  

^a NONE

Author keywords

Air bearing; Compensation; Friction drive; Kr+ laser; Laser interferometer; Optical disk; Pit; Pitch; Precision control; Reflector; Roll; Software servo; Track; Yaw

Indexed keywords

CONTROL EQUIPMENT; CONTROL SYSTEMS; FRICTION; INTERFEROMETERS; LASER APPLICATIONS; LASER OPTICS; MIRRORS; SERVOMECHANISMS; STEP RESPONSE;

FRICTION DRIVE; LASER INTERFEROMETER; OPTICAL DISK MASTERING MACHINE; PITCH; PRECISION CONTROL; TRACK;

OPTICAL DISK STORAGE;

EID: 0030260671     PISSN: 09120289     EISSN: None     Source Type: Journal    
DOI: 10.2493/jjspe.62.1444     Document Type: Article

References (10)

1. F. Hara, M. Itoo, M. Kasai, T. Tajima, K. Andoo, M. Hayama, T. Nunomura and H. Watanabe : Development of a Precise Optical Disk Mastering Machine, Int. Conf. Advanced Mechanics, (1988) 593.
2. R. R. Donaldson and S. R. Patterson : Design and Construction of a Large Vertical Axis Diamond Turning Machine, SPIE, 433, (1983) 62.
3. J. M. Paros and L. Weisbord : Flexure Pivots to Replace Knife Edge and Ball Bearing, Mach. Des., 37, (1965) 151.
4. K. Ueda, A. Amano, K. Ogawa, S. Sakuta and S. Murai : Machining High-Precision Mirrors Using Newly Developed CNC Machine, Ann. CIRP, 40, 1, (1991) 555.