AFM studies of the initial stages of spin-coated prepolymer film growth on silicon wafers

Advanced Materials

Volumn 8, Issue 10, 1996, Pages 829-833

  Gesang, Thomas ^a   Höper, Ralf ^a   Possart, Wulf ^a   Petermann, Jürgen ^a   Hennemann, Otto Diedrich ^a  

^a FRAUNHOFER INSTITUTE FOR MANUFACTURING TECHNOLOGY AND ADVANCED MATERIALS IFAM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COATING TECHNIQUES; ORGANIC POLYMERS; SILICON WAFERS; SUBSTRATES;

BISPHENOL DICYANATE; SPIN COATED PREPOLYMER FILM GROWTH; TRIAZINE RING;

FILM GROWTH;

EID: 0030260212     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/adma.19960081014     Document Type: Article

References (20)

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15. Zero acceleration could not be safely be identified, due to inaccuracies in retrieving the center of rotation in the AFM.
16. The convolution between AFM tip and sample (W. Hanrieder, R. Mock, H. Meixner, Ultramicroscopy 1992, 42-44, 169) will not hamper the determination of heights as long as access to the height levels to be compared is given.
17. This procedure neglects the convolution between AFM tip and sample (Ref. [10]), which results in an over-estimation of the area fraction of protrusions and in an under-estimation of the area fraction of depressions.
18. T. Gesang, W. Possart, O.-D. Hennemann, J. Petermann, Langmuir 1996, 12, 3341.
19. W. Possart, S. Dieckhoff, D. Fanter, A. Hartwig, R. Höper, T. Gesang, O.-D. Hennemann, V. Schlett, J. Adhesion, in press.
20. This is slightly more than the calculated height of the trimer (0.9 nm), since the triazine ring is not located in the wafer surface but by a bond length (typical value 0.1 nm [Römpp Chemie Lexikon, Bd. 1 (Eds: J. Falbe, M. Regitz), Georg Thieme Verlag, Stuttgart 1989, p. 654]) above the wafer surface.