Synchrotron radiation X-ray lithography for ULSI fabrication

NEC Research and Development

Volumn 37, Issue 4, 1996, Pages 432-439

  Fujii, Kiyoshi ^a   Tsuboi, Shinji ^a   Yoshihara, Takuya ^a   Tanaka, Yuusuke ^a   Suzuki, Katsumi ^a   Hamada, Masayuki ^b   Tanigawa, Takaho ^b  

^a Microlectron Research Laboratories

^b ULSI Device Development Laboratories

Author keywords

DRAM; Hot carrier; Overlay; Resist; Synchrotron radiation; X ray lithography

Indexed keywords

ANNEALING; HOT CARRIERS; MOSFET DEVICES; PERFORMANCE; SYNCHROTRON RADIATION; X RAY LITHOGRAPHY;

RESISTS;

ULSI CIRCUITS;

EID: 0030259455     PISSN: 0547051X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (9)

1. K. Fujii, et al., "Sub-half-micron Metal-oxide-semiconductor Device Fabrication Using a Compact Synchrotron Radiation System," J. Vac. Sci. Technol., B11, pp. 2897-2901, 1993.
2. K. Fujii, et al., "Applicability Test for Synchrotron Radiation X-ray Lithography in 64 Mb Dynamic Random Access Memory Fabrication Processes," J. Vac. Sci. Technol., B12, pp. 3949-3953, 1994.
3. S. Tsuboi and K. Suzuki, "X-ray Mask Fabrication Using Advanced Optical Lithography," J. Vac. Sci. Technol., B11, pp. 2994-2996, 1993.
4. T. Yoshihara and K. Suzuki, "Sputtering of Fibrous-structured Low-stress Ta Films for X-ray Masks," J. Vac. Sci. Technol., B12, pp. 4001-4004, 1994.
5. H. Yamada, "Commissioning of Aurora: The Smallest Synchrotron Light Source," J. Vac. Sci. Technol., B8, pp. 1628-1632, 1990.
6. H. Kuroda, et al., "Highly Reliable Oscillating Mirror System for Synchrotron Radiation Lithography," J. Vac. Sci. Technol., B9, pp. 3218-3221, 1991.
7. S. Hamada, et al., "22 nm Overlay Accuracy of Synchrotron Radiation Stepper Using an Improved Chromatic Bifocus Alignment System," SPIE, 2194, pp. 73-82, 1994.
8. A. Acovic, et al., "Reduced Hot-Carrier Reliability Degradation of X-ray Irradiated MOSFETs in a 0.25 mm CMOS Technology with Ultra-Thin Gate Oxide," Solid-State Electronics, 36, pp. 1353-1355, 1993.
9. T. Tsuchiya, et al., "Effects of Synchrotron Radiation X-ray Irradiation on Hot Carrier Reliability in Subquarter-Micrometer NMOSFETs," IEICE Trans. Electron, E76-C, pp. 506-510, 1993.