Deconvolution of SIMS depth profiles of boron in silicon

Surface and Interface Analysis

Volumn 24, Issue 11, 1996, Pages 733-745

  Gautier, B ^a   Prost, R ^b   Prudon, G ^a   Dupuy, J C ^a  

^a INSTITUT DES NANOTECHNOLOGIES DE LYON   (France)

^b CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; BORON; FUNCTIONS; ITERATIVE METHODS; MATHEMATICAL MODELS; SILICON;

DECONVOLUTION; DELTA LAYERS; DEPTH RESOLUTION FUNCTION; ITERATIVE DECONVOLUTION ALGORITHM; RESOLUTION FUNCTION;

SECONDARY ION MASS SPECTROMETRY;

EID: 0030259302     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1096-9918(199610)24:11<733::AID-SIA173>3.0.CO;2-W     Document Type: Article

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