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Volumn 21, Issue 20, 1996, Pages 1664-1666
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Zero-gap directional coupler switch integrated into a silicon-on insulator for 1.3-μm operation
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Author keywords
[No Author keywords available]
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Indexed keywords
BONDING;
CROSSTALK;
ETCHING;
INTEGRATED OPTOELECTRONICS;
LIGHT INTERFERENCE;
PLASMAS;
POTASSIUM COMPOUNDS;
SILICA;
SILICON;
SILICON ON INSULATOR TECHNOLOGY;
VOLTAGE MEASUREMENT;
WAVEGUIDE COUPLERS;
BACKPOLISHING;
INSERTION LOSS;
PLASMA DISPERSION EFFECTS;
POTASSIUM HYDROXIDE;
THERMAL BONDING;
ZERO GAP DIRECTIONAL COUPLER SWITCH;
OPTICAL SWITCHES;
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EID: 0030258662
PISSN: 01469592
EISSN: None
Source Type: Journal
DOI: 10.1364/OL.21.001664 Document Type: Article |
Times cited : (36)
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References (9)
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