Optical path length trimming technique using thin film heaters for silica-based waveguides on Si

Electronics Letters

Volumn 32, Issue 19, 1996, Pages 1818-1820

  Abe, M ^a   Inoue, Y ^a   Moriwaki, K ^a   Okuno, M ^a   Ohmori, Y ^a  

^a NTT CORPORATION   (Japan)

Author keywords

Optical waveguides; Planar lightwave circuits

Indexed keywords

OPTICAL SWITCHES; REFRACTIVE INDEX; SEMICONDUCTING SILICON; SILICA; THIN FILMS;

OPTICAL PATH LENGTH TRIMMING TECHNIQUE; PLANAR LIGHTWAVE CIRCUITS; THERMO-OPTIC SWITCHES; THIN FILM HEATERS;

OPTICAL WAVEGUIDES;

EID: 0030247987     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:19961211     Document Type: Article

References (8)

1. KAWACHI, M.: 'Silica waveguides on silicon and their application to integrated-optic components'. Opt. Quantum. Electron., 1990, 22, pp. 391-416
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3. OKUNO, M., SUGITA, A., JINGUJI, K., and KAWACHI, M.: 'Birefringence control of silica waveguides on Si and its application to a polarization-beam splitter/switch', J. Lightwave Technol., 1994, LT-12, pp. 625-633
4. 2-doped silica optical waveguides on silicon substrate'. Electron. Lett., 1991, 27, pp. 2294-2295
5. KASHYAP, R., MAXWELL, O.D., and AINSLIE, B.J.: 'Laser-trimmed fourport bandpass filter fabricated in single-mode photosensitive Gedoped planar waveguide', IEEE Photonics Technol. Lett., 1993, 5, (2), pp. 191-194
6. UETSUKA, H., KUROSAWA, M., and IMOTO, K.: 'Novel method for centre wavelength tuning of silica waveguide type Mach-Zehnder multi/demultiplexers'. Electron. Lett., 1990, 26, (4), pp. 251-253
7. SYMS, R.R.A., LEWANDOWSKI, J., NIELD, M., and MACKENZIE, F.: 'Bipolar tuning of silica-on silicon directional couplers by electron beam irradiation'. IEEE Photonics Technol. Lett., 1994, 6, (4). pp. 525-527
8. MORIWAKI, K., ABE, M., INOUE, Y., OKUNO, M., and OHMORI, Y.: 'A new silica-based 8×8 thermo-optic matrix-switch on Si without the need for bias power'. Proc. OFC'95, 1995, Paper WS1