Fabrication of a silicon-based superfluid oscillator

Journal of Microelectromechanical Systems

Volumn 5, Issue 3, 1996, Pages 180-186

  Schwab, Keith ^a,b,c   Steinhauer, J ^a   Davis, J C ^a   Packard, Richard E ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF CHICAGO   (United States)

^c CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC NOISE; ELECTRON BEAM LITHOGRAPHY; MICROMACHINING; PERFORMANCE; SEMICONDUCTING SILICON; SUPERFLUID HELIUM;

INTERNAL VOLUME; MACROSCOPIC QUANTUM PHENOMENA; MICROAPERTURE; SILICON BASED SUPERFLUID OSCILLATORS; SILICON PROCESSING;

OSCILLATORS (ELECTRONIC);

EID: 0030246792     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.536624     Document Type: Article

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