Shadowed sputtering of gold on V-shaped microtrenches etched in silicon and applications in microfabrication

Advanced Materials

Volumn 8, Issue 9, 1996, Pages 765-768

  Xia, Younan ^a   Whitesides, George M ^a  

^a HARVARD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; ETCHING; GOLD; MICROELECTRONIC PROCESSING; MICROMACHINING; MONOLAYERS; SEMICONDUCTING SILICON; SPUTTERING; SUBSTRATES; SURFACE PROPERTIES; SURFACE STRUCTURE; TOPOLOGY;

MICROCONTACT PRINTING; MICROMOLDING IN CAPILLARIES; MICROTRENCHES; SELECTIVE WET ETCHING; SELF ASSEMBLED MONOLAYERS; SHADOWED SPUTTERING;

MICROSTRUCTURE;

EID: 0030246612     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/adma.19960080915     Document Type: Article

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