Atomic force microscopy of laser induced sub-micrometer periodic structures on implanted fused silica and silicon

Applied Surface Science

Volumn 103, Issue 1, 1996, Pages 49-54

  Bukharaev, A A ^a   Janduganov, V M ^a   Samarsky, E A ^a   Berdunov, N V ^a  

^a ZAVOISKY PHYSICAL TECHNICAL INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHIZATION; ATOMIC FORCE MICROSCOPY; DIFFRACTION GRATINGS; FUSED SILICA; INTERFACES (MATERIALS); ION BOMBARDMENT; LASER BEAM EFFECTS; LIGHT ABSORPTION; SILICON; ULTRATHIN FILMS; ULTRAVIOLET RADIATION;

LASER INDUCED DIFFRACTION GRATINGS; OPTICAL ADSORPTION COEFFICIENT; SUBMICROMETER DIFFRACTION GRATINGS; ULTRATHIN LAYERS;

SURFACE STRUCTURE;

EID: 0030246259     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/0169-4332(95)00602-8     Document Type: Article

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