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A third possibility, amirphization of the APBs during the ion milling sequence itself, is ruled out. First, the 25-nm-thick YBCO film, that does not exhibit any amorphous regions, has been prepared with the same parameters of the thinning procedure as the thicker films. One may argue that amorphization during sample processing may only occur in highly strained films. In this case, the increase of the residual surface resistance with film thickness would remain unexplained and the correspondence of the Thz resistance change with the structural changes found in the data would be merely coincidental.
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