A comparative study on the microstructure and tribological properties of Si3N4 and TiN films produced by the IBED method

Tribology International

Volumn 29, Issue 6, 1996, Pages 507-513

  Zhuang, Da Ming ^a   Liu, Jia Jun ^a   Zhu, Bao Liang ^a   Li, Wen Zhi ^a   Zhang, Xu Shou ^b   Yang, Sheng Rong ^b  

^a TSINGHUA UNIVERSITY   (China)

^b NONE

Author keywords

Ceramic thin film; Friction; Ion beam enhanced deposition; Wear; Wear resistance

Indexed keywords

DEPOSITION; FATIGUE TESTING; HARDNESS; ION BEAMS; MICROSTRUCTURE; SCANNING ELECTRON MICROSCOPY; SILICON NITRIDE; STEEL TESTING; THIN FILMS; TITANIUM NITRIDE; TRIBOLOGY; WEAR RESISTANCE;

CERAMIC THIN FILMS; FRICTION COEFFICIENT; ION BEAM ENHANCED DEPOSITION;

CERAMIC MATERIALS;

EID: 0030243575     PISSN: 0301679X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0301-679X(95)00114-J     Document Type: Article

References (9)

1. Erch R.A., Erdemir A., Fenske G.R. and Hsieh J.H. Lubr. Eng. April 1992, 307
2. Tian Minpo and Liu Deling Handbook of Thin Films Science and Technology, China Machine Press, 1991, 730
3. Bieli A.V., Kheyrandish H. and Colligon J.S. Thin Solid Films 1991, 200, 283
4. Hibbs M.K., Johansson B.O., Sundgren J.E. and Helmersson V. Thin Solid Films 1984, 122. 115
5. Burnett P.J. and Rickerby D.S. Thin Solid Films 1988, 157, 233
6. Zheng Linqing The Principles of Tribology, China Higher Education Press, 1994
7. Zhu B., Yang Z. and Liu J. Proc. 6th International Conference on Wear of Materials 1, ASME, 1997, 233
8. Heilmann P. and Rigney D.A. Wear 1981, 72, 195
9. Kato K., Diao D.F. and Tsutsumi M. Proc. 8th International Conference on Wear of Materials. ASME, 1991, 243