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Volumn 83, Issue 1-3, 1996, Pages 109-114
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The use of EXAFS spectroscopy to show the structural modifications in metals implanted with N+ ions
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Author keywords
Amorphization of metals; EXAFS; N+ implantation; Ta; Ti
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Indexed keywords
ABSORPTION SPECTROSCOPY;
AMORPHIZATION;
CHEMICAL BONDS;
CHEMICAL MODIFICATION;
COMPOSITION EFFECTS;
ELECTRON ENERGY LEVELS;
FILM GROWTH;
ION BOMBARDMENT;
METALLIC FILMS;
NITROGEN;
TANTALUM COMPOUNDS;
TITANIUM COMPOUNDS;
STRUCTURAL MODIFICATIONS;
X RAY ABSORPTION SPECTROSCOPY;
ION IMPLANTATION;
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EID: 0030243014
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/0257-8972(95)02812-9 Document Type: Article |
Times cited : (6)
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References (17)
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