High-fluence nitrogen implantation into metals

Surface and Coatings Technology

Volumn 83, Issue 1-3, 1996, Pages 275-279

  Miyagawa, Y ^a   Ikeyama, M ^a   Saitoh, K ^a   Nakao, S ^a   Miyagawa, S ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Dynamic Monte Carlo simulation; High fluence nitrogen implantation; Implanted nitrogen depth profile; Metal sputtering by nitrogen

Indexed keywords

CERAMIC MATERIALS; COMPUTER SIMULATION; COMPUTER SOFTWARE; DIFFUSION IN SOLIDS; MONTE CARLO METHODS; NITRIDES; NITROGEN; SPUTTERING; STOICHIOMETRY;

DEPTH PROFILING; HIGH FLUENCE NITROGEN IMPLANTATION; NUCLEAR REACTION ANALYSIS; SOFTWARE PACKAGE SASAMAL;

ION IMPLANTATION;

EID: 0030242796     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/0257-8972(95)02814-5     Document Type: Article

References (17)

1. K. Hohmuth and B. Rauschenbach, Mater. Sci. Eng., 69 (1985) 489.
2. N. Moncoffre and J. Jagielski, Surf. Coat. Technol., 65 (1994) 30.
3. K. Yabe, O. Nishimura, T. Hujihana and M. Iwaki, Surf. Coat. Technol., 66 (1994) 250.
4. S. Miyagawa, M. Ikeyama, K. Saitoh, S. Nakao, Y. Sakai and Y. Miyagawa, Nucl. Instrum. Methods B, 80/81 (1993) 480.
5. Y. Miyagawa, M. Ikeyama, K. Saitoh, G. Massouras and S. Miyagawa, J. Appl. Phys., 70 (1991) 7289.
6. Y. Miyagawa, Y. Sakai, M. Ikeyama, K. Saitoh, S. Nakao and S. Miyagawa, Radiat. Eff., 130 (1994) 471.
7. T. Fujihana, Y. Okabe, K. Takahashi and M. Iwaki, Nucl. Instrum. Methods B, 45 (1990) 669.
8. S. Miyagawa, K. Saitoh, M. Ikeyama, G. Massouras and Y. Miyagawa, Nucl. Instrum. Methods B, 69 (1992) 437.
9. S. Lucas, G. Terwagne and F. Bodart, Nucl. Instrum. Methods, B, 50 (1990) 401.
10. G. Marest, C. Skoutarides, Th. Barnavon, J. Tousset, S. Fayeulle and M. Robelet, Nucl. Instrum. Methods, 209/210 (1983) 259.
11. Y. Miyagawa, S. Nakao, K. Saitoh, M. Ikeyama, S. Tanemura and S. Miyagawa, Proc. 9th Int. Conf. on Ion Beam Modification of Materials, Canberra, Australia, Nucl. Instrum. Methods, B, 106 (1995) 170.
12. W. Eckstein, in Computer Simulation of Ion-Solid Interactions, Vol. 10, Springer Series in Materials Science, Springer Verlag, 1992.
13. Y. Miyagawa, K. Saitoh and S. Miyagawa, Proc. 12th Int. Conf. on Ion Beam Analysis, Arizona State University, May, 1995, Nucl. Instrum. Methods, in press.
14. Y. Miyagawa, M. Ikeyama, K. Saitoh, S. Nakao and S. Miyagawa, Surf. Coat. Technol., 66 (1994) 235.
15. G. Terwagne, S. Lucas and F. Bodart, Nucl. Instrum. Methods B, 66 (1992) 262.
16. N. Matsunami, Y. Yamamura, Y. Ichikawa, N. Itoh, Y. Kazumata, S. Miyagawa, K. Morita, R. Shimizu and H. Tawara, Atom. Data Nucl. Data Tables, 31 (1981) 1.
17. O.F. Goktepe, J.M. Lambert and A.M. Vincenz, Nucl. Instrum. Methods B, 59/60 (1991) 33.