AFM fabrication of metal-oxide devices with in situ control of electrical properties

Physica B: Condensed Matter

Volumn 227, Issue 1-4, 1996, Pages 279-281

  Snow, E S ^a   Campbell, P M ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

Anodic oxidation; Atomic force microscope; Nanofabrication

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC PROPERTIES; METALS; OXIDES; WIRE;

ANODIC OXIDATION; NANOFABRICATION;

NANOTECHNOLOGY;

EID: 0030235339     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/0921-4526(96)00420-6     Document Type: Article

References (9)

1. E.S. Snow and P.M. Campbell, Appl. Phys. Lett. 64 (1994) 1932.
2. E.S. Snow and P.M. Campbell, Science, 270 (1995) 1670.
3. J.A. Dagata et al., Appl. Phys. Lett. 56 (1990) 2001.
4. H. Sugimura, T. Uchida, N. Kitamura and H. Masuhara, Jpn. J. Appl. Phys. 32 (1993) L553.
5. K. Matsumoto et al., Jpn. J. Appl. Phys. 34 (1995) 1387.
6. K. Matsumoto, paper presented at the 53rd Device Research Conference, Charlottesville, VA, 1995.
7. H. Sugimura, T. Uchida, N. Kitamura and H. Masuhara, Appl. Phys. Lett. 63 (1993) 1288.
8. E.S. Snow and P.M. Campbell, Materials Fabrication and Patterning at the Nanoscale, Proc. Material Research Society, San Fransisco, CA, 1995, in press.
9. The exact dimensions of the wire are obscured by tip convolution effects and uncertainty in the profile of the oxide below the surface. In this size regime, the measured resistance yields a more accurate estimate of the width.