Surface roughness of PbZrxTi1-xO3 thin films produced by pulsed laser ablation-deposition

Thin Solid Films

Volumn 283, Issue 1-2, 1996, Pages 45-48

  Dat, R ^a   Auciello, O ^a,b   Kingon, A I ^a  

^a North Carolina State University   (United States)

^b MCNC   (United States)

Author keywords

Atomic force microscopy (AFM); Deposition process; Laser ablation; Surface roughness

Indexed keywords

ACTIVATION ENERGY; ATOMIC FORCE MICROSCOPY; DEPOSITION; INTEGRATED CIRCUIT MANUFACTURE; LASER ABLATION; PULSED LASER APPLICATIONS; SEMICONDUCTING LEAD COMPOUNDS; SURFACE PHENOMENA; SURFACE ROUGHNESS; SURFACE TREATMENT;

DEPOSITION TEMPERATURE; LASER ENERGY DENSITY; LEAD ZIRCONIA TITANATE; OXYGEN PRESSURE; PULSED LASER ABLATION DEPOSITION; ROOT MEAN SQUARE TOUGHNESS;

THIN FILMS;

EID: 0030234996     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(95)08518-1     Document Type: Article

References (11)

1. J.T. Cheung and H. Sankur, CRC Crit. Rev. Solid State Mater. Sci., 15 (1) (1988) 63.
2. H. Schwartz and H.A. Tourtellotte, J. Vac. Sci. Technol., 6 (1969) 373.
3. A. Cheenne, J. Perriere, F. Kerherve, G. Hauchecorne, E. Fogarassy and C. Fuchs, in D.C. Paine and J.C. Bravman (eds.), Laser ablation for materials synthesis, Mater. Res. Soc. Symp. Proc., 191 (1990) 229.
4. D.J. Lichtenwalner, R. Dat, O. Auciello and A.I. Kingon, Proceedings of 8th International Meeting on Ferroelectricity, Gaithersburg, MD, 1994, Ferroelectrics, 152 (1994) 97.
5. H.S. Kim and H.S. Kwok, Appl. Phys. Lett., 61 (18) (1992) 2234.
6. D.B. Chrisey, J.S. Horwitz and K.S. Grabowski, in D.C. Paine and J.C. Bravman (eds.), Laser ablation for materials synthesis, Mater. Res. Soc. Symp. Proc., 191 (1990) 25.
7. T. Venkatesan, X.D. Wu, A. Inam and J.B. Wachtman, Appl. Phys. Lett., 52 (14) (1988) 1193.
8. D.J. Lichtenwalner, O. Auciello, R. Dat and A.I. Kingon, J. Appl. Phys., 74 (12) (1993) 7497.
9. G. Koren, R.J. Baseman, A. Gupta, M.I. Lutwyche and R.B. Laibowitz, Appl. Phys. Lett., 56 (21) (1990) 2144.
10. A. Kasuya and Y. Nishina, in B. Braren, J.J. Dubowski and D.P. Norton (eds.), Laser ablation in materials processing: fundamentals and applications, Mater. Res. Soc. Symp. Proc., 285 (1993) 111.
11. P. Roland, S.J. La Placa and J.J. Wynne, in B. Braren, J.J. Dubowski and D.P. Norton (eds.), Laser ablation in materials processing: fundamentals and applications, Mater. Res. Soc. Symp. Proc., 285 (1993) 117.