Structure and magnetic properties of Fe-Ti-N films deposited by DC magnetron facing target sputtering

Physica Status Solidi (A) Applied Research

Volumn 157, Issue 1, 1996, Pages 139-152

  Peng, D L ^a   Sumiyama, K ^a   Oku, M ^a   Li, D X ^a   Suzuki, K ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION EFFECTS; CRYSTAL LATTICES; CRYSTAL MICROSTRUCTURE; DOPING (ADDITIVES); IRON ALLOYS; MAGNETIC PROPERTIES; MAGNETRON SPUTTERING; SPUTTER DEPOSITION; STRESSES; SUPERSATURATION; THERMAL EFFECTS; VOLUME FRACTION;

DC MAGNETRON FACING TARGET SPUTTERING;

METALLIC FILMS;

EID: 0030234777     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssa.2211570118     Document Type: Article

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