Interface properties of PN x /InP structures by in-situ remote plasma processes

Applied Surface Science

Volumn 104-105, Issue , 1996, Pages 428-433

  Sugino, Takashi ^a   Sakamoto, Yoshifumi ^a   Miyazaki, Takashi ^a   Shirafuji, Junji ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; HETEROJUNCTIONS; INTERFACES (MATERIALS); PLASMA APPLICATIONS; SCHOTTKY BARRIER DIODES; SEMICONDUCTING INDIUM PHOSPHIDE;

BARRIER HEIGHT;

MIS DEVICES;

EID: 0030234596     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(96)00182-1     Document Type: Article

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