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Volumn 284-285, Issue , 1996, Pages 94-97
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A hybrid phthalocyanine/silicon field-effect transistor sensor for NO2
a a a b b c |
Author keywords
Metal oxide semiconductor structure; Nitrogen dioxide; Sensors; Silicon
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Indexed keywords
ABSORPTION SPECTROSCOPY;
CHEMICAL SENSORS;
COATINGS;
GATES (TRANSISTOR);
LANGMUIR BLODGETT FILMS;
MOSFET DEVICES;
NITROGEN OXIDES;
ORGANOMETALLICS;
SEMICONDUCTOR DEVICE STRUCTURES;
SILICON;
GATE VOLTAGE;
PHTHALOCYANINE FILMS;
THIN FILMS;
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EID: 0030234405
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(95)08279-4 Document Type: Article |
Times cited : (36)
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References (11)
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