The Influence of Fe-Group Metals on the CVD of Titanium Carbide

Chemical Vapor Deposition

Volumn 2, Issue 5, 1996, Pages 199-208

  Konyashin, Igor Y ^a,b  

^a Hard and Refractory Met Res Inst   (Russian Federation)

^b MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

Author keywords

Chemical vapor deposition; Deposition rate; Fe group metals; Morphology; Titanium carbide

Indexed keywords

COBALT; COMPOSITION EFFECTS; COMPUTER SIMULATION; DECOMPOSITION; IRON; METHANE; MORPHOLOGY; NICKEL; PROTECTIVE COATINGS; SUBSTRATES; TITANIUM CARBIDE; TITANIUM NITRIDE;

CARBURIZATION; IRON GROUP METALS;

CHEMICAL VAPOR DEPOSITION;

EID: 0030233679     PISSN: 09481907     EISSN: None     Source Type: Journal    
DOI: 10.1002/cvde.19960020509     Document Type: Article

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