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Volumn 283, Issue 1-2, 1996, Pages 8-11
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Transparent contacts to β-SiC for optical electronic device applications
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Author keywords
Chemical vapour deposition; Contacts; Optical properties; Silicon carbide
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
CURRENT VOLTAGE CHARACTERISTICS;
ELECTRIC RESISTANCE;
ELECTRIC VARIABLES MEASUREMENT;
OHMIC CONTACTS;
OPTICAL PROPERTIES;
OPTOELECTRONIC DEVICES;
SCHOTTKY BARRIER DIODES;
SEMICONDUCTING FILMS;
SILICON CARBIDE;
TEMPERATURE;
TRANSPARENCY;
RAPID THERMAL CHEMICAL VAPOR DEPOSITION;
SPECIFIC CONTACT RESISTANCE;
TRANSMISSION LINE METHOD;
TRANSPARENT CONTACTS;
TRANSPARENT INDIUM TIN OXIDE;
SEMICONDUCTING SILICON COMPOUNDS;
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EID: 0030233249
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/0040-6090(96)08785-8 Document Type: Article |
Times cited : (3)
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References (12)
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