High-rigidity multi-degree-of-freedom fine motion mechanism using piezoelectric actuators (2nd report). Extension to six-degrees-of-freedom

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

Volumn 62, Issue 9, 1996, Pages 1302-1306

  Oiwa, T ^a   Kamiura, T ^a   Kyusojin, A ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DEGREES OF FREEDOM (MECHANICS); DESIGN; ERROR CORRECTION; LOADS (FORCES); POSITION CONTROL;

PIEZOELECTRIC DEVICES;

EID: 0030233205     PISSN: 09120289     EISSN: None     Source Type: Journal    
DOI: 10.2493/jjspe.62.1302     Document Type: Article

References (2)