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Volumn 35, Issue 9 A, 1996, Pages 4755-4759
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Pattern formation of sputtered films by deposition through mask
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Author keywords
Mask; Pattern formation; Silver film; Sputtering; Thickness distribution; Thin film
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Indexed keywords
FILM THICKNESS DISTRIBUTION;
FILM PREPARATION;
MAGNETRON SPUTTERING;
MASKS;
METALLIC FILMS;
SILVER;
THICKNESS MEASUREMENT;
THIN FILMS;
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EID: 0030233165
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.35.4755 Document Type: Article |
Times cited : (6)
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References (14)
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