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Volumn 35, Issue 9 A, 1996, Pages 4755-4759

Pattern formation of sputtered films by deposition through mask

Author keywords

Mask; Pattern formation; Silver film; Sputtering; Thickness distribution; Thin film

Indexed keywords

FILM THICKNESS DISTRIBUTION;

EID: 0030233165     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.4755     Document Type: Article
Times cited : (6)

References (14)
  • 3
    • 0001414456 scopus 로고
    • S. Swan: Vacuum 38 (1988) 791.
    • (1988) Vacuum , vol.38 , pp. 791
    • Swan, S.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.