메뉴 건너뛰기




Volumn 157, Issue 1, 1996, Pages 37-48

Dynamic modelling of the diffusion-segregation gettering. Application to the gettering by Al in Si

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; COMPOSITION EFFECTS; CRYSTAL IMPURITIES; DIFFUSION IN SOLIDS; MATHEMATICAL MODELS; SILICON; THERMAL EFFECTS; THERMODYNAMICS;

EID: 0030232763     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssa.2211570106     Document Type: Article
Times cited : (8)

References (14)
  • 7
    • 0003166837 scopus 로고
    • Diffusion-Segregation Equation and Simulation of the Diffusion-Segregation Phenomena
    • Electrochem. Soc., Pennington (PA)
    • T. Y. TAN, R. GAFITEANU, and U. M. GÖSELE, Diffusion-Segregation Equation and Simulation of the Diffusion-Segregation Phenomena, in: Semiconductor Silicon 1994, Electrochem. Soc., Pennington (PA) 1994 (p. 920).
    • (1994) Semiconductor Silicon 1994 , pp. 920
    • Tan, T.Y.1    Gafiteanu, R.2    Gösele, U.M.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.