Electrically isolated metal-semiconductor field effect transistors and logic circuits on homoepitaxial diamonds

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 35, Issue 9 B, 1996, Pages

  Kawarada, H ^a   Itoh, M ^a   Hokazono, A ^a  

^a WASEDA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DESIGN; DIAMONDS; LOGIC CIRCUITS; PLASMA APPLICATIONS; TECHNOLOGY;

DEVICE ISOLATION; HYDROGEN-TERMINATED SURFACE;

MESFET DEVICES;

EID: 0030232185     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.l1165     Document Type: Article

References (15)