Fabrication of micrometer-scale structures on GaAs and GaAs/AlGaAs quantum well material using microcontact printing

Nanotechnology

Volumn 7, Issue 3, 1996, Pages 266-269

  Kim, E ^a   Whitesides, G M ^a   Freiler, M B ^b   Levy, M ^b   Lin, J L ^b   Osgood Jr , R M ^b  

^a HARVARD UNIVERSITY   (United States)

^b Och Spine at New York Presbyterian Hospitals   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; ETCHING; LITHOGRAPHY; LUMINESCENCE; MONOLAYERS; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTOR QUANTUM WELLS; SUBSTRATES;

GOLD ETCH MASKS; MICROCONTACT PRINTING; MICROMETER SCALE STRUCTURES;

MASKS;

EID: 0030231383     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/7/3/016     Document Type: Article

References (14)

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