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Volumn 14, Issue 5, 1996, Pages 493-498
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Integrated flexible microactuator systems
a a a a |
Author keywords
Flexible; FMA; Integrated; Microactuator system; Rubber actuator
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Indexed keywords
FABRICATION;
LITHOGRAPHY;
MANIPULATORS;
MICROELECTRONICS;
MOBILE ROBOTS;
MODELS;
MOTION PLANNING;
PNEUMATIC CONTROL EQUIPMENT;
RUBBER APPLICATIONS;
BALL HANDLING ABILITY;
FLEXIBLE MICROACTUATOR;
MICROROBOTS;
STEREO LITHOGRAPHY;
ACTUATORS;
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EID: 0030231019
PISSN: 02635747
EISSN: None
Source Type: Journal
DOI: 10.1017/s0263574700019974 Document Type: Article |
Times cited : (14)
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References (13)
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