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Volumn 50, Issue 9, 1996, Pages 1156-1160
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Complete optical analysis to obtain the absorption coefficient of the interstitial oxygen vibration in silicon
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Author keywords
Infrared; Interstitial oxygen; Optical analysis; Silicon; Surface roughness
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Indexed keywords
ERROR ANALYSIS;
GEOMETRICAL OPTICS;
INFRARED SPECTROSCOPY;
LIGHT ABSORPTION;
MOLECULAR VIBRATIONS;
OPTICAL TESTING;
SILICON;
SURFACE ROUGHNESS;
INTERSTITIAL OXYGEN;
OXYGEN;
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EID: 0030230553
PISSN: 00037028
EISSN: None
Source Type: Journal
DOI: 10.1366/0003702963905105 Document Type: Article |
Times cited : (6)
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References (16)
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