DC electroluminescence from PECVD grown thin films of silicon-rich silica

Electronics Letters

Volumn 32, Issue 18, 1996, Pages 1703-1704

  Trwoga, P F ^a   Kenyon, A J ^a   Pitt, C W ^a  

^a UNIVERSITY COLLEGE LONDON   (United Kingdom)

Author keywords

Electroluminescence; Semiconductor thin films

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC SPACE CHARGE; ELECTRIC VARIABLES MEASUREMENT; ELECTRON DEVICE MANUFACTURE; EMISSION SPECTROSCOPY; LUMINESCENT DEVICES; MOS DEVICES; SILICA; SILICON WAFERS; THIN FILMS;

CURRENT VOLTAGE CURVE MEASUREMENT; DC ELECTROLUMINESCENCE SPECTRUM; MICROSTRUCTURED SILICON; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

ELECTROLUMINESCENCE;

EID: 0030219487     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:19961122     Document Type: Article

References (10)

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