Boron nitride hard coatings by ion beam and vapor deposition

Thin Solid Films

Volumn 281-282, Issue 1-2, 1996, Pages 327-330

  Nishiyama, Satoshi ^a   Takahashi, Eiji ^a   Iwamoto, Yasuo ^a   Ebe, Akinori ^a   Kuratani, Naoto ^a   Ogata, Kiyoshi ^a  

^a NISSIN ELECTRIC CO LTD   (Japan)

Author keywords

Boron nitride; Ion bombardment; Multilayers; Tribology

Indexed keywords

BORON COMPOUNDS; CORROSION RESISTANCE; CRYSTAL STRUCTURE; HEAT TREATMENT; ION BEAMS; ION BOMBARDMENT; MULTILAYERS; STOICHIOMETRY; SYNTHESIS (CHEMICAL); TRIBOLOGY; VAPOR DEPOSITION; WEAR RESISTANCE;

BORON NITRIDE HARD COATINGS; COMPRESSION MOULDING TESTS; GLASS FORMING; INFRARED RADIATION ANALYSIS; MOULDING DIE;

THIN FILMS;

EID: 0030219380     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(96)08658-0     Document Type: Article

References (7)

1. Y. Andoh, S. Nishiyama, H. Kirimura, T. Mikami, K. Ogata and F. Fujimoto, Nucl. Instr. and Meth., B59/60 (1991) 276.
2. D.J. Kester and R. Messier, J. Appl. Phys. 72 (1992) 504.
3. N. Tanabe and M. Iwaki, Nucl. Instr. and Meth., B80/81 (1993) 1349.
4. S. Nishiyama, A. Ebe, N. Kuratani, Y. Iwamoto and K. Ogata, Proc. 9th Int. Conf. on Ion Beam Modification of Materials (IBMM'95), 1995.
5. N. Yamashita, T. Wada, M. Ogawa, T. Kobayashi, H. Tsukamoto and T. Rokkaku, Surf. Coat. Technol., 54/55 (1992) 418.
6. S. Nishiyama, N. Kuratani, A. Ebe and K. Ogata, Nucl. Instr. and Meth., B80/81 (1993) 1485.
7. S. Nishiyama, A. Ebe, Y. Iwamoto and K. Ogata, Adv. in New Diamond Sci. and Technol., Myu, Tokyo, 1994, p. 631.