Extended resolution for lateral structuring with laser interference gratings using high-index input coupling

Physica Status Solidi (A) Applied Research

Volumn 156, Issue 2, 1996, Pages k13-k16

  Kelly, M K ^a   Dahlheimer, B ^a  

^a WALTER SCHOTTKY INSTITUT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; GEOMETRY; LIGHT POLARIZATION; NEODYMIUM LASERS; PRISMS; REFRACTIVE INDEX; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR MATERIALS;

HIGH ENERGY PULSED LASER INTERFERENCE PATTERN; HIGH INDEX INPUT COUPLING; HIGH RESOLUTION THERMAL PROCESSING; LASER INTERFERENCE GRATINGS; LATERAL STRUCTURING;

OPTICAL RESOLVING POWER;

EID: 0030219359     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssa.2211560231     Document Type: Article

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