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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 116, Issue 1-4, 1996, Pages 1-12

From processing of cosmic ices to optical communications

(1) Brown, Walter L a

a LUCENT TECHNOLOGIES (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIA; INTEGRATED CIRCUITS; ION BOMBARDMENT; IRRADIATION; METHANE; OPTICAL COMMUNICATION; PHOTOLITHOGRAPHY; SILICON WAFERS; SOLAR SYSTEM; ULTRAVIOLET RADIATION; WATER;

COSMIC ICES; SUBMICRON SILICON INTEGRATED CIRCUITS; WAVELENGTH;

RADIATION EFFECTS;

EID: 0030219262 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/0168-583X(96)00119-X Document Type: Article

Times cited : (2)

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